| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet for suction fixing with the air permeability improved while excellent surface flatness is well maintained. SOLUTION: The sheet 50 for suction fixing is equipped with a porous layer 21 having a sucking surface 21a whereto a sucking action is applied from a suction unit, a plurality of holes TH formed in the porous layer 21 through a mechanical or a chemical boring process so that openings are located in the suction surface 21a, and a working surface 23b positioned opposite the sucking surface 21a about the plurality of holes TH and contacting the component to be sucked and fixed. COPYRIGHT: (C)2009,JPO&INPIT |
