| 摘要 |
PROBLEM TO BE SOLVED: To avoid an erroneous action as to a separation position and a contact position after changing a probe card, by a simple method. SOLUTION: The erroneous action is avoided after changing the probe card, as to the separation position approached in the first positioning process in order to produce a distance between a needle tip of the probe card and a stored substrate, the contact position approached in the second positioning process until bringing the probe card into contact with the stored substrate, and an image of a displayed needle, in vertical positioning of the probe card with respect to the test substrate, as a purpose. The purpose is attained by the fact that the stored contact position is image-formed when image-forming the needle tip, that the display of the contact position is changed until corresponding to a real height of a contact point proper to each probe card, and that setting therein is then stored as a new contact position. COPYRIGHT: (C)2009,JPO&INPIT |
