| 摘要 |
PROBLEM TO BE SOLVED: To provide a prober system in which cost reduction is achieved by reducing the number of mechanisms, and control is simplified. SOLUTION: The prober system is provided with probe sections each positioning a test object by driving chucks each supporting the test object in a fore-and-aft direction and a rotating direction, and executing a test by allowing the test object to contact with a probe needle; alignment sections each aligning the test object; and a chuck moving mechanism for moving the chucks between the probe sections and the alignment sections. A plurality of the probe sections are juxtaposed and arranged. Each of the alignment sections is disposed between the two adjacent probe sections. The chuck moving mechanism is provided over the adjacent probe sections, so that the chucks can be supported movably to the same alignment section. Two or more columns each having the probe section and the alignment section alternately arranged are disposed in parallel to each other. COPYRIGHT: (C)2009,JPO&INPIT
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