发明名称 METHOD OF FABRICATING A LAYER WITH TINY STRUCTURE AND THIN FILM TRANSISTOR COMPRISING THE SAME
摘要 A method of fabricating a layer with a tiny structure and a thin film transistor comprising the same is disclosed. The method of fabricating the layer with a tiny structure comprises providing a substrate, coating a coating composition on the substrate to form a coating layer, wherein the coating composition comprises nano conductive particles or nano semiconductor particles having functional groups bonded on a surface thereof uniformly dispersed in a solvent, and irradiating the coating layer by an additional energy to break the functional groups, resulting in aggregation of nano conductive particles or nano semiconductor particles to form a tiny structure.
申请公布号 US2009035898(A1) 申请公布日期 2009.02.05
申请号 US20070874820 申请日期 2007.10.18
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 JONG CHAO-AN
分类号 H01L21/336;B05D3/06 主分类号 H01L21/336
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