| 发明名称 |
HIGH-CAPACITANCE DENSITY THIN FILM DIELECTRICS HAVING COLUMNAR GRAINS FORMED ON BASE-METAL FOILS |
| 摘要 |
Deposited thin-film dielectrics having columnar grains and high dielectric constants are formed on heat treated and polished metal foil. The sputtered dielectrics are annealed at low oxygen partial pressures.
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| 申请公布号 |
US2009035913(A1) |
申请公布日期 |
2009.02.05 |
| 申请号 |
US20070832995 |
申请日期 |
2007.08.02 |
| 申请人 |
E.I. DU PONT DE NEMOURS AND COMPANY |
发明人 |
BAO LIJIE;LI ZHIGANG RICK;REARDON DAMIEN F.;RYLEY JAMES F.;PALANDUZ CENGIZ AHMET |
| 分类号 |
H01L21/20 |
主分类号 |
H01L21/20 |
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