| 摘要 |
A conditioning disk for grinding pad is provided to actively make polishing working as a cutting protrusion is a polygonal cone shape and prevent scratch generated by dropped particle from a cutting protrusion and a foreign material existing on a grinding pad. A conditioning disk for grinding pad comprises a conditioning disk(100) for a grinding pad, a disk body(110), a plurality of foreign substance discharge grooves(130) formed in one of the disk body with the radial shape and a plurality of cutting protrusions(120) protruding to one side of the disk body. The conditioning disk for grinding pad is formed by sintering nano powder of ceramics, diamond and boron nitriding compound.
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