| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical measuring device capable of performing various measurements with a simple constitution. SOLUTION: Measuring light 124 from a light source 126 is reflected by a reflection part 121 of a cone mirror 108 through a lens system 107, and output to the measuring object 150 side through openings of light shielding members 105, 106 as wide radial light 119 for measuring a defect. Measuring light 125 transmitted through a through hole 109 of the cone mirror 108 is reflected by a reflection part 122 on the periphery of the top part 111 of a cone mirror 110, and output to the measuring object 150 side through the openings of the light shielding members 105, 106 as narrow radial light 120 for measuring a length characteristic. The light 119 for measuring a defect and the light 120 for measuring a length characteristic reflected by the measuring object 150 are detected respectively by measuring parts 112, 116, and existence determination, shape calculation or the like of a defect of the measuring object 150 is performed by an operation control part 128. COPYRIGHT: (C)2009,JPO&INPIT
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