| 摘要 |
PROBLEM TO BE SOLVED: To easily change the shape and size of a vacuum chamber, e.g., in accordance with the request of users even after the vacuum chamber is installed. SOLUTION: The vacuum chamber 1 is freely dividedly composed of: a chamber body 2 formed, so as to be a rectangular shape; triangular side face frames 3a, 3b adhesively joined so as to be freely removal to both the side faces of the chamber body 2 with bolts; upper plates 6, 9a, 9b joined to the respectively opening upper faces of the chamber body 2, and the side face frames 3a, 3b; and a bottom plate 7 joined to the respective opening bottom face of the chamber body 2, and the side face frames 3a, 3b, thus the shape and size of the vacuum chamber can be easily changed, e.g., in accordance with the request of users. COPYRIGHT: (C)2009,JPO&INPIT
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