| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for measuring a flying height of a magnetic head slider stably flying over a compact and transparent cylinder. SOLUTION: A cylindrical hub 4 having a through hole 32 or a groove 32' is attached to the inside of a hollow quartz cylinder 3. The magnetic head slider 1 is arranged, facing the quartz cylinder 3. The hub 4 and the cylinder 3 are rotated by a motor 52. Light of a light source 63 is emitted from a side opposite to the magnetic head slider 1. The intensity of interference light from interference fringes produced by the light having passed through the through hole 32 or the groove 32' of the quartz cylinder 3 and the hub 4 on a floating surface of the magnetic head slider 1 is measured by an optical device 9. The flying height of the magnetic head slider 1 from the quartz cylinder 3 is obtained from the intensity of the interference light. COPYRIGHT: (C)2009,JPO&INPIT
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