发明名称 METHODS OF FABRICATING DUAL FIN STRUCTURES AND SEMICONDUCTOR DEVICE STRUCTURES WITH DUAL FIN STRUCTURES
摘要 Fin-FET devices and methods of fabrication are disclosed. The Fin-FET devices include dual fins that may be used to provide a trench region between a source region and a drain region. In some embodiments, the dual fins may be formed by forming a trench with fin structures on opposite sides in a protruding region of a substrate. The dual fins may be useful in forming single-gate, double-gate or triple-gate fin-FET devices. Electronic systems including such fin-FET devices are also disclosed.
申请公布号 US2009032866(A1) 申请公布日期 2009.02.05
申请号 US20070831296 申请日期 2007.07.31
申请人 MICRON TECHNOLOGY, INC. 发明人 MCDANIEL TERRENCE
分类号 H01L21/336;H01L29/94 主分类号 H01L21/336
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