VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON SCHICHTEN AUS POLYSILIZIUM ODER AMORPHEM SILIZIUM,申请号DE19996040159-传众专利搜索

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发明名称	VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON SCHICHTEN AUS POLYSILIZIUM ODER AMORPHEM SILIZIUM
摘要
申请公布号	DE69940159(D1)	申请公布日期	2009.02.05
申请号	DE19996040159	申请日期	1999.09.28
申请人	APPLIED MATERIALS INC.	发明人	WANG, SHULIN
分类号	C23C16/44;C23C16/24;C23C16/455;H01L21/205;H01L21/285;H01L21/768	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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