| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample mounting member to be used for a TEM or FIB device, allowing easy alignment of a sample to the rotational center during installing the sample, while reducing a degree of reattaching of fouling to the sample. SOLUTION: The sample mounting member 101 is provided for supporting the sample 10 directly on a sample holder which introduces the three-dimensional sample 10 into a transmission type electron microscope or a focused ion beam machining device. It has a columnar lower part 2 including a connection portion at the lower end, and an upper part 1 having an upper face 3 on which the sample 10 is mounted. The upper part 1 includes a first cliff portion 4 on the first side at the outer edge of the upper face 3, sheer almost vertically toward the lower side. COPYRIGHT: (C)2009,JPO&INPIT
|
