| 摘要 |
The invention relates to an arrangement for producing coatings on substrates in vacuo. A plasma is produced by electric arc discharge on a target that is connected as the cathode and the arc discharge between an anode and the target is ignited by means of a mobile focused laser beam that is directed through a window onto the surface of the target. The aim of the invention is to provide a technical solution that allows an undesired coating in the window zone of a vacuum chamber to be considerably reduced. To achieve this aim, a permanent magnet or electromagnet is arranged between the window and at least one target laterally next to, above or below the optical axis of the laser beam and the laser beam is guided through a magnetic filed produced by the permanent magnet or electromagnet. |
