发明名称 |
METHOD OF PREPARING A DIE AND USE OF THE SO OBTAINED DIE FOR ETCHING A SUBSTRATE |
摘要 |
Use of a die (1) for etching a substrate (2), the use provide to keep in contact the substrate (2) and the die (1) and put them under an electrical tension; the die (1) comprises a conductive element (3), a layer (9) of an insulating material, which is shaped so as to delimitate on a surface (4) of the conductive element (3) an uncovered area defining a pattern (6), and an electrolyte material (7) firmly placed into the pattern (6) in contact with the surface (4) of the conductive element (3) and presenting a viscosity of at least 50 Pa-s. |
申请公布号 |
WO2009016493(A2) |
申请公布日期 |
2009.02.05 |
申请号 |
WO2008IB02014 |
申请日期 |
2008.08.01 |
申请人 |
ALMA MATER STUDIORUM - UNIVERSITA' DI BOLOGNA;SETTI, LEONARDO;FRALEONI MORGERA, ALESSANDRO;MENCARELLI, IVAN |
发明人 |
SETTI, LEONARDO;FRALEONI MORGERA, ALESSANDRO;MENCARELLI, IVAN |
分类号 |
H01L31/18 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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