发明名称 METHOD OF PREPARING A DIE AND USE OF THE SO OBTAINED DIE FOR ETCHING A SUBSTRATE
摘要 Use of a die (1) for etching a substrate (2), the use provide to keep in contact the substrate (2) and the die (1) and put them under an electrical tension; the die (1) comprises a conductive element (3), a layer (9) of an insulating material, which is shaped so as to delimitate on a surface (4) of the conductive element (3) an uncovered area defining a pattern (6), and an electrolyte material (7) firmly placed into the pattern (6) in contact with the surface (4) of the conductive element (3) and presenting a viscosity of at least 50 Pa-s.
申请公布号 WO2009016493(A2) 申请公布日期 2009.02.05
申请号 WO2008IB02014 申请日期 2008.08.01
申请人 ALMA MATER STUDIORUM - UNIVERSITA' DI BOLOGNA;SETTI, LEONARDO;FRALEONI MORGERA, ALESSANDRO;MENCARELLI, IVAN 发明人 SETTI, LEONARDO;FRALEONI MORGERA, ALESSANDRO;MENCARELLI, IVAN
分类号 H01L31/18 主分类号 H01L31/18
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