MANUFACTURING METHOD OF OPTICAL WAVEGUIDE

摘要

PROBLEM TO BE SOLVED: To manufacture an optical waveguide wherein propagation loss is reduced by recovering oxygen deficiency in vacuum plasma.

SOLUTION: This manufacturing method of the optical waveguide for forming the optical waveguide in an oxide compound substrate includes first process of forming the optical waveguide in the oxide compound substrate by dry etching process, and a second process of re-coupling the oxygen damaged by the dry etching process by applying heat treatment to the oxide compound substrate having the optical waveguide in an oxygen atmosphere.

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