| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspecting tool capable of arranging conductive pins coming into contact with a target to be inspected with a narrow pitch. <P>SOLUTION: The inspecting tool includes a plurality of conductive pins 10, a tip support 20 having a plurality of tip insertion holes from which tips of the conductive pins protrude for supporting the tips of the conductive pins and a tail support 30 having a plurality of tail insertion holes into which the conductive pins are inserted for supporting the tails of the conductive pins. The tip support 20 and the tail support 30 are structured by overlapping two substrates (21 and 22) and (31 and 32) having a plurality of parallel long holes formed so that the long holes are orthogonal, and the tip insertion holes and the tail insertion holes are formed at positions where the long holes of the two substrates intersect. In this tool, since through holes are formed at the positions where the two long holes formed by a dicing saw intersect to serve as the insertion holes for the conductive pins, an arrangement pitch of the pins coincides with a distance between centers of the parallel long holes. The tool has a narrow arrangement pitch of the conductive pins, enabling accurate and stable inspection. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
