| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor deposition apparatus capable of forming a high quality thin film, a vapor deposition method, and a method for manufacturing an organic electroluminescence display device. SOLUTION: In the vapor deposition apparatus 2, a mask 14 having an opening pattern is arranged on a vapor deposition surface 12a of a substrate 12 and the deposition of a prescribed pattern is performed on the vapor deposition surface 12a of the substrate 12. The vapor deposition apparatus 2 includes: a chamber 18; a mask holding part 36 which is provided in the chamber 18 and shifts the first surface being brought into contact with the substrate 12 of the mask 14 to a position opposing to the vapor deposition surface 12a of the substrate 12; and a control part 38 having a function to control the operation of the mask holding part 36. COPYRIGHT: (C)2009,JPO&INPIT
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