发明名称 CENTRIFUGAL METHOD FOR FILING HIGH ASPECT RATIO BLIND MICRO VIAS WITH POWDERED MATERIALS FOR CIRCUIT FORMATION
摘要 The present disclosure relates generally to semiconductor, integrated circuits, and particularly, but not by way of limitation, to centrifugal methods of filling high-aspect ratio vias and trenches with powders, pastes, suspensions of materials to act as any of a conducting, structural support, or protective member of an electronic component.
申请公布号 US2009032962(A1) 申请公布日期 2009.02.05
申请号 US20080247894 申请日期 2008.10.08
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION (YORKTOWN) 发明人 HOUGHAM GARETH;BUCHWALTER LEENA P.;BUCHWALTER STEPHEN L.;CASEY JON;FEGER CLAUDIUS;FLOTTA MATTEO;GELORME JEFFREY D.;HINGE KATHLEEN C.;JAIN ANURAG;KANG SUNG K.;KNICKERBOCKER JOHN U.
分类号 H01L23/52;B04B11/00;H01L21/44 主分类号 H01L23/52
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