ANGULAR VELOCITY SENSOR AND METHOD OF SETTING TEMPERATURE CHARACTERISTICS OF ANGULAR VELOCITY SENSOR

摘要

In a method of setting temperature characteristics of an angular velocity sensor, temperature characteristics of a detuning frequency are acquired. The detuning frequency is a frequency difference between an oscillation frequency of an oscillation circuit including a piezoelectric vibrator and a frequency of a voltage of the piezoelectric vibrator caused by the Coriolis force. The sensitivity to the detuning frequency is acquired. The temperature characteristics of a detection phase are acquired. The detection phase is a phase difference between a Coriolis signal phase that corresponds to a phase angle of a voltage signal and an oscillation signal phase of the oscillation circuit. The sensitivity to the detection phase is acquired. The amount of phase shift of the detection phase is determined so that the change in sensitivity caused by the change in the detuning frequency with temperature is controlled using the change in sensitivity caused by the change in the detection phase with temperature.