发明名称 SYNTHETIC QUARTZ GLASS BODY, PROCESS FOR PRODUCING THE SAME, OPTICAL ELEMENT, AND OPTICAL APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a synthetic quartz glass body having a high light transmittance which is used for transmitting a light selected from the group consisting of infrared light, visible light, and ultraviolet light. <P>SOLUTION: A method for manufacturing the synthetic quartz glass body, in which the concentration of fluorine atom is gradually decreased in the depth direction from the surface in a surface part, comprises forming voids in the surface part of the synthetic quartz glass body by bringing a fluorinating agent into contact with a surface of a synthetic quartz glass body and infiltrating the fluorinating agent to the inside 2 of the synthetic quartz glass body to modify the surface part. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009023898(A) 申请公布日期 2009.02.05
申请号 JP20080111999 申请日期 2008.04.23
申请人 ASAHI GLASS CO LTD 发明人 TAMITSUJI SHINYA;WATANABE KUNIO;OKADA KANAME;KOBAYASHI DAISUKE
分类号 C03B20/00;C03C3/06;C03C15/00;G02B1/11;G02B3/00;G02B5/18;G02B5/30;G03F1/60;H01L21/027 主分类号 C03B20/00
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