发明名称 |
SYNTHETIC QUARTZ GLASS BODY, PROCESS FOR PRODUCING THE SAME, OPTICAL ELEMENT, AND OPTICAL APPARATUS |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a synthetic quartz glass body having a high light transmittance which is used for transmitting a light selected from the group consisting of infrared light, visible light, and ultraviolet light. <P>SOLUTION: A method for manufacturing the synthetic quartz glass body, in which the concentration of fluorine atom is gradually decreased in the depth direction from the surface in a surface part, comprises forming voids in the surface part of the synthetic quartz glass body by bringing a fluorinating agent into contact with a surface of a synthetic quartz glass body and infiltrating the fluorinating agent to the inside 2 of the synthetic quartz glass body to modify the surface part. <P>COPYRIGHT: (C)2009,JPO&INPIT |
申请公布号 |
JP2009023898(A) |
申请公布日期 |
2009.02.05 |
申请号 |
JP20080111999 |
申请日期 |
2008.04.23 |
申请人 |
ASAHI GLASS CO LTD |
发明人 |
TAMITSUJI SHINYA;WATANABE KUNIO;OKADA KANAME;KOBAYASHI DAISUKE |
分类号 |
C03B20/00;C03C3/06;C03C15/00;G02B1/11;G02B3/00;G02B5/18;G02B5/30;G03F1/60;H01L21/027 |
主分类号 |
C03B20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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