| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for generating a fluorine-based gas and hydrogen gas, which can collect and utilize not only the fluorine-based gas but also the generated hydrogen gas with high purity. SOLUTION: The apparatus is directed at generating the fluorine-based gas and hydrogen gas by electrolyzing an electrolytic bath 2 in an electrolytic tank 1 which has an anode chamber 3 and a cathode chamber 4, and includes: a pipe 61 for supplying hydrogen gas, which is connected so as to communicate with a gas phase part in the cathode chamber 4 and supplies the hydrogen gas generated in the cathode chamber 4; a first automatic valve 41 which is installed at some midpoint of the pipe 61 for supplying the hydrogen gas; a first pressurizer 47 which is installed downstream of the first automatic valve 41; a pipe 62 for supplying the fluorine-based gas, which is connected so as to communicate with a gas phase part in the anode chamber 3 and supplies the fluorine-based gas generated in the anode chamber 3; a second automatic valve 42 which is installed at some midpoint of the pipe 62 for supplying the fluorine-based gas; and a second pressurizer 48 which is installed downstream of the second automatic valve 42. COPYRIGHT: (C)2009,JPO&INPIT
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