GAS SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

The present disclosure relates to a gas sensor, and more particularly, to a gas sensor using carbon nanotube and a method of manufacturing the same. The present disclosure provides a method of manufacturing a gas sensor, including: (a) forming a first insulating film on upper and lower surfaces of a silicon substrate; (b) forming a first metal film having a predetermined pattern on the first insulating film formed on the upper surface of the silicon substrate; (c) forming a second insulating film on the first metal film; (d) forming a second metal film having a predetermined pattern on the second insulating film; (e) coating a carbon nanotube mixed solution mixed with carbon nanotube(CNT), conductive polymer and a deionized water on the second metal film; and (f) heating the carbon nanotube mixed solution to form a carbon nanotube film.