| 摘要 |
<P>PROBLEM TO BE SOLVED: To appropriately obtain data with excellent efficiency. <P>SOLUTION: In the substrate treatment system, a group management device 3 for managing a plurality of substrate treating apparatuses M1-Mn is provided with a summary data preparation system 80. The summary data preparation system 80 stores data acquired from the substrate treating apparatuses M1-Mn in a first memory 81, acquires theoretical data from the first memory 81, generates data for data acquisition period detection by a data acquisition period detection part 84 from the theoretical data, and stores them in a second memory 82. At every fixed interval of time, the data are acquired from the second memory 82 and analyzed using the data for the data acquisition period detection and summary data are stored in a third memory 83 by a summary data storage/management part 85. An operator can acquire the summary data from the third memory 83 when analyzing the data or the like, so that the data are easily and highly accurately analyzed. <P>COPYRIGHT: (C)2009,JPO&INPIT |
