| 摘要 |
There are provided first and second characteristic change portions 9 and 10 having characteristic boundary inclination directions different from each other in an inner half portion and an outer half portion of the encoder 4. Detections portions of one pair of sensors 6a1 (6b1, 6c1) and 6a2 (6b2, 6c2) are opposed to three circumferential positions of both the characteristic change portions 9 and 10. A operator has a function of calculating the displacements x, y, z, and inclinations Phix, Phiz, on the basis of phase differences among output signals of the sensors 6a1, 6a2, 6b1, 6b2, 6c1, and 6c2.
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