| 摘要 |
A planar pulse motor includes a stator and a mover which is arranged opposite to the stator and which has a plurality of coils. The planar pulse motor can drive the mover in a first direction on a horizontal plane and in a second direction orthogonal to the first direction by controlling current flowing in the plurality of coils. The stator has a plurality of raised portions, including a plurality of first raised portions composed by laminating a plurality of layers of members including magnetic materials through which magnetic flux can pass only in the first direction and a plurality of second raised portions composed by laminating a plurality of layers of members including magnetic materials through which magnetic flux can pass only in the second direction, and a plurality of recessed portions through which magnetic flux does not pass in either the first or the second direction. The plurality of raised portions are regularly arranged in a vicinity of each of recessed portions in the first and second directions.
|
