Verfahren zur Herstellung einer Multipollinse, Multipollinse und damit ausgerüsteter Teilchenstrahlapparat,申请号DE20046018560T-传众专利搜索

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发明名称	Verfahren zur Herstellung einer Multipollinse, Multipollinse und damit ausgerüsteter Teilchenstrahlapparat
摘要
申请公布号	DE602004018560(D1)	申请公布日期	2009.02.05
申请号	DE20046018560T	申请日期	2004.03.19
申请人	JEOL LTD.	发明人	KAWAI, EIJI
分类号	H01J3/22;H01J37/10;H01J9/02;H01J9/14;H01J9/236;H01J37/141	主分类号	H01J3/22
代理机构		代理人
主权项
地址

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