| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To form a reforming region long in a direction along a partition schedule line. <P>SOLUTION: The major axis direction of a pulse laser beam is adapted to be aligned to a partition schedule line direction of a quartz substrate W. Therefore, as compared to, for example, a method of aligning the minor axis direction of the pulse laser beam of an elliptic shape to the direction along the partition schedule line of the quartz substrate W, the irradiation region of the pulse laser beam can be more expanded in a direction along the partition schedule line and the reforming region longer in the direction along the partition schedule line can be formed. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
