发明名称 SHEET TRANSFER DEVICE, SHEET TREATMENT AND TRANSFER SYSTEM, AND SHEET TRANSFER METHOD
摘要 PROBLEM TO BE SOLVED: To simplify the constitution of a sheet transfer device 7, and to reduce its production cost. SOLUTION: This device includes its body, disposed at a transfer station between first and second treatment stations, a floating unit disposed on the device body to float a sheet and a plurality of X-axially extending transfer arms 35, disposed on the device body 17 which is X-axially movable at Y-axial intervals; a first suction pad 47 sticking to the rear of a sheet W, when drawing out the sheet W from a first sheet treatment device 3A (3B, 3C) toward the device body 17 is provided on one X-axial end of each transfer arm 35; and a second suction pad 49, sticking fast to the rear of the sheet W when feeding out the sheet W from the device body 17 toward a second sheet treatment device 5A (5B, 5C), is provided at the other X-axial end of each transfer arm 35. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009026783(A) 申请公布日期 2009.02.05
申请号 JP20070185240 申请日期 2007.07.17
申请人 IHI CORP 发明人 HIRATA KENSUKE;TANAKA KAI
分类号 H01L21/677;B65G49/06;B65G51/03 主分类号 H01L21/677
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