TRAY FOR MASKING, AND FILM-FORMING APPARATUS AND FILM-FORMING METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a masking tray which can be used for a plurality of types of substrates to be vapor-deposited having different spots to be vapor-deposited. SOLUTION: The tray for masking includes a frame for accommodating the substrate to be vapor-deposited therein, and a deposition shield which is movably placed in the frame and partially prevents the vapor deposition onto the substrate to be vapor-deposited. COPYRIGHT: (C)2009,JPO&INPIT