| 摘要 |
PROBLEM TO BE SOLVED: To provide a levitation conveying system for improving efficiency of a conveying work of a thin sheet with the levitation conveying system by sufficiently suppressing a part of the thin sheet from being interfered with an edge part of the levitation unit even when an extremely deformable thin sheet is conveyed in the conveying direction in its levitation state. SOLUTION: The arrangement state of a plurality of levitation units 17, 29 in a straight part is in a zigzag arrangement. The center of the unit of most part of levitation units 45 in a corner part agrees with the intersection between a plurality of virtual first parallel lines which are parallel to the virtual bisector for bisecting the intersecting angle between a first conveying direction D1 and a second conveying direction D2, and set to be at even intervals along the direction orthogonal to the virtual bisector and a plurality of virtual second parallel lines which are parallel to the virtual orthogonal line orthogonal to the virtual bisector and set to be at even intervals along the longitudinal direction of the virtual bisector. COPYRIGHT: (C)2009,JPO&INPIT
|
