发明名称 FLOATING TRANSFER APPARATUS, AND TREATING SYSTEM HAVING THE FLOATING TRANSFER APPARATUS
摘要 Provided is a floating transfer apparatus for extracting an object from an external apparatus and for floating and transferring the object by a fluid. The floating transfer apparatus comprises a platform having a first region and a second region, a first transfer unit and a second transfer unit constituted to contact the object and to transfer the object from the first region to the second region and arrayed in the first region and the second region, respectively, and a first floating unit having injection ports for injecting the fluid to apply a floating force to the object and arranged over the platform. Further comprised is a second floating unit arranged over the platform and along the first transfer unit and having injection ports for injecting the fluid to apply a first floating unit to the object. The second floating unit controls the floating height of the object over the first transfer unit between a first height, at which the second transfer unit is prevented from coming into driving contact with the object, and a second height, at which the second transfer unit is allowed to come into driving contact with the object.
申请公布号 WO2009016920(A1) 申请公布日期 2009.02.05
申请号 WO2008JP62091 申请日期 2008.07.03
申请人 IHI CORPORATION;HIRATA, KENSUKE 发明人 HIRATA, KENSUKE
分类号 B65G51/03;B65G49/06;H01L21/677 主分类号 B65G51/03
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