ACTUATOR

摘要

In one embodiment an electrostatic actuator includes: a first conductor (44) associated with each chamber (36); a second conductor (90) having a plurality of flexible first parts (86) supported by a plurality of second parts, each flexible first part (86) forming at least part of a wall of each chamber (36) and each flexible first part (86) located opposite a corresponding one of the first conductors (44) across a gap (58); and a voltage source operatively connected to each of the first conductors (44) for selectively applying a voltage between each of the first conductors (44) and the second conductor (90). In another embodiment, an electrostatic actuator includes: a plurality of rigid conductors (44) arranged adjacent to one another along a chamber (36); and a flexible conductor (86) disposed opposite to and spanning the plurality of rigid conductors (44) across a gap (58), the flexible conductor (86) forming at least part of one wall of the chamber (36) such that flexing the flexible conductor (86) flexes the wall to change the volume of the chamber (36).