Nano-robotics module, particularly for measuring surface properties, comprises drive device and measuring unit with measuring probe, which has closure in nanometer range

摘要

The nano-robotics module (2) comprises a drive device and a measuring unit with a measuring probe, which has a closure in a nanometer range. The nano-robotics module has a measuring area in the centimeter range, where the measuring probe is sensitive in multiple spatial directions. Independent claims are also included for the following: (1) a system with a vacuum chamber in a nano-robotics module (2) a method for using a nano-robotics module (3) a changeover adapter, particularly for changing a nano-robotics module (4) a system with a changeover adapter.