发明名称 INSPECTION APPARATUS, EXPOSURE DEVICE AND INSPECTION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To prevent a decline in an operating rate of device by minimizing the maintenance time of the device. <P>SOLUTION: An apparatus includes an image obtaining part which obtains the image of an index; an information obtaining means which obtains the information about the index from the image obtained by the image obtaining part; a prediction means which predicts the degree of need for maintenance based on the information about the index; and a display means which displays the prediction results in the prediction means. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009027020(A) 申请公布日期 2009.02.05
申请号 JP20070189711 申请日期 2007.07.20
申请人 NIKON CORP 发明人 KUNIYONE YUJI
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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