| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for measuring shape capable of precisely measuring the three-dimensional shape of a specimen. SOLUTION: The apparatus for measuring shape 10 measures the shape of a specimen M by irradiating the specimen M with measurement light and detecting light reflected from the specimen. The apparatus for measuring shape 10 comprises a scanning member (polygon mirror 14) for scanning the specimen M with the measurement light; a slit member (first limiting slit 15) at the side of the measurement light for limiting the size of the luminous flux of the measuring light while an opening 15a extended along the scanning direction of the measuring light scanned by the scanning member is formed; an optical member (deformed prism 16) for reducing the change in the intensity distribution of the measurement light in a direction vertical to the longitudinal direction of the opening of the slit member on the side of the measurement light; and a photographing means 17, to which light reflected from the specimen is made incident, to detect the image of the measurement light on the specimen. COPYRIGHT: (C)2009,JPO&INPIT
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