摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor integrated device having high-accuracy capacitors, and to provide an inspection method therefor. SOLUTION: This device is equipped with a functional circuit 14, having a capacitor C1; an oscillation circuit 15 having a capacitor C0; a switching means 16 for separating electrically the capacitor C1 from the functional circuit 14, corresponding to a control signal Vctrl, and connecting it, in parallel with the capacitor C0 of the oscillation circuit 15; and an output part 18 for outputting an oscillation output "RFout" from the oscillation circuit 15. An oscillation frequency f0 of the oscillation circuit 15 is determined, and the oscillation frequency f1 of the oscillation circuit 15 after the capacitor C1 is connected in parallel with the capacitor C0 is determined, and the capacity of the capacitor C1 is obtained from the oscillation frequency f0 and the oscillation frequency f1. COPYRIGHT: (C)2009,JPO&INPIT
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