发明名称 |
Defects Inspecting Apparatus And Defects Inspecting Method |
摘要 |
An inspecting apparatus and method including first and second illuminating units for illuminating a surface of a specimen to be inspected with different incident angles and first and second detecting optical units arranged at different elevation angle directions to the surface of the specimen for detecting images of the specimen illuminated by the first and second illuminating units.
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申请公布号 |
US2009033924(A1) |
申请公布日期 |
2009.02.05 |
申请号 |
US20080192578 |
申请日期 |
2008.08.15 |
申请人 |
UTO SACHIO;NOGUCHI MINORI;NISHIYAMA HIDETOSHI;OHSHIMA YOSHIMASA;HAMAMATSU AKIRA;JINGU TAKAHIRO;NAKATA TOSHIHIKO;WATANABE MASAHIRO |
发明人 |
UTO SACHIO;NOGUCHI MINORI;NISHIYAMA HIDETOSHI;OHSHIMA YOSHIMASA;HAMAMATSU AKIRA;JINGU TAKAHIRO;NAKATA TOSHIHIKO;WATANABE MASAHIRO |
分类号 |
G01N21/88;G01N21/956;G01N21/95;G06T7/00 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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地址 |
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