| 摘要 |
The invention relates to a positioning system for a microstage, having a DC actuating motor (6) which is coupled to the microstage by means of a threaded spindle (4) and a spindle nut (3). That end of the threaded spindle (4) which is situated opposite the DC actuating motor (6) is provided with a rotary piezo motor (11) which is coupled to the threaded spindle (4) by means of a permanently electromagnetic clutch (10). The DC actuating motor for large actuating paths and the rotary piezo motor for actuating paths in the nanometer range act on the same threaded spindle. When the positioning system is used, the microstage is moved into a technologically predetermined position by the DC actuating motor by means of the ball screw and the permanently electromagnetic clutch is activated in such a way that the rotary piezo motor is directly coupled to the threaded spindle, while the DC actuating motor is uncoupled from the threaded spindle. |
