| 摘要 |
<p>A method of manufacturing the device and the exposure apparatus using the drive unit are provided to reduce contamination within a stage chamber and to improve the degree of vacuum. The drive unit operates the object under the vacuum environment. The drive unit comprises the movable element(2) including one or more magnet, the stator(4) having one or more coil and the first chamber including a partition. The inside of the first chamber is maintained under the vacuum environment. The stator has the upper side which is a part of the partition. The object is mounted in the movable element. The movable element is moved in the non contact state along the upper side of stator by applying current to one or more coil.</p> |
