| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for discharging liquid drops which is improved in the processing precision of a pattern by accelerating drying of the liquid drops in a micronized pattern. SOLUTION: A spray port 24 is adjacent to a liquid drop discharge head 22 and sprays air for drying different from the volatile component of a liquid drop D toward the isolate liquid drop D before being melted locally to substitute the surrounding of the liquid drop D with the air for drying. Then, a sucking port 25 is adjacent to the liquid drop discharge 22 head to suck the surrounding of the liquid drop D. COPYRIGHT: (C)2009,JPO&INPIT
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