| 发明名称 |
Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing |
| 摘要 |
A method for refurbishing at least a portion of an electrostatic chuck. The method comprises removing a first dielectric component from a fluid distribution element of the electrostatic chuck and replacing the first dielectric component with a second dielectric component.
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| 申请公布号 |
US2009034149(A1) |
申请公布日期 |
2009.02.05 |
| 申请号 |
US20070888341 |
申请日期 |
2007.07.31 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LUBOMIRSKY DMITRY;CHEN XINGLONG;GONDHALEKAR SUDHIR;NARENDRNATH KADTHALA RAMAYA;RASHEED MUHAMMAD;KAUSHAL TONY |
| 分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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