发明名称 CONTAINER FOR HOUSING A MASK BLANK, METHOD OF HOUSING A MASK BLANK, AND MASK BLANK PACKAGE
摘要 A container is adapted to receive a mask blank having a resist film and includes a container body having an upper opening and a cap put on the container body. The container body has an opening edge provided with an annular elastic member made of polyolefin elastomer or the like and extending throughout entire circumference. When the cap is put on the container body, the elastic member is interposed at a joint portion between the cap and the container body to hermetically seal the container.
申请公布号 US2009035666(A1) 申请公布日期 2009.02.05
申请号 US20080242116 申请日期 2008.09.30
申请人 HOYA CORPORATION 发明人 KURIKAWA AKINORI
分类号 B65D85/48;G03F1/14;B08B9/08;B65D85/86;H01L21/02;H01L21/673 主分类号 B65D85/48
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