SELF-SUPPORTING MULTILAYER FILMS HAVING A DIAMOND-LIKE CARBON LAYER

摘要

Disclosed are a variety of self-supporting, multilayer carbon films that include a layer of both a non-diamond carbon, for example, graphite or amorphous carbon (a-C), and a layer of diamond-like carbon (DLC). A wide range of multilayer configurations may be constructed on the particular combination of properties desired in the final product including, for example, a tri-layer construction (200) including a single DLC layer (108) sandwiched between two layers of amorphous carbon (106 &110). Also disclosed are example embodiments of methods for producing such composite multilayer films that include preparing an appropriate substrate (102) to include a deposition surface of sufficient smoothness, applying a parting or release agent to the deposition surface (104), depositing a plurality of layer carbon layers including both an amorphous carbon layer (106 &11) and a DLC layer (108) to form the composite carbon film and removing the composite carbon film from the substrate.