| 摘要 |
[PROBLEMS] To classify a type of a defect of a TFT array in a TFT array inspecting process. [MEANS FOR SOLVING PROBLEMS] A TFT array inspecting device (1) detects the TFT defect based on a detection waveform obtained by two-dimensionally scanning an electron beam on the TFT array and it is provided with a defect type classifying part (6) classifying the type of the defect of TFT. The defect type classifying part 6 compares an inspection waveform obtained in TFT array inspection for classifying the type of the defect of TFT with a known reference waveform by comparing the reference waveform which is previously prepared with the detection waveform. Thus, the defect type can be classified and the defect type that cannot be discriminated in picture display is discriminated.
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