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发明名称
Method for forming of BPSG liner
摘要
申请公布号
KR100881510(B1)
申请公布日期
2009.02.05
申请号
KR20060134569
申请日期
2006.12.27
申请人
发明人
分类号
H01L21/314
主分类号
H01L21/314
代理机构
代理人
主权项
地址
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