发明名称 FERROELECTRIC MATERIAL, AND MANUFACTURING METHOD THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To provide a ferroelectric material which does not contain Pb and is excellent in ferroelectric characteristics and polarization fatigue characteristics, and to provide a manufacturing method thereof. <P>SOLUTION: For the ferroelectric material and the manufacturing method thereof, in a perovskite ferroelectric material having strontium, a metal M1, a metal M2 and oxygen and expressed by chemical formula of Sr(M1<SB>X</SB>M2<SB>1-x</SB>)O<SB>3</SB>, the metal M1 and the metal M2 are two optional metals different from other, which are selected from zirconium, molybdenum, tungsten, vanadium, tantalum and niobium, and X is the composition range of 0-1. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009026994(A) 申请公布日期 2009.02.05
申请号 JP20070189292 申请日期 2007.07.20
申请人 ROHM CO LTD 发明人 TAMAI SHINICHI
分类号 H01L21/316;H01L21/8246;H01L27/105;H01L41/083;H01L41/107;H01L41/18;H01L41/22;H01L41/318;H01L41/39;H01L41/43 主分类号 H01L21/316
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