| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric element capable of giving the same characteristics to each piezoelectric element, and to provide a manufacturing method of an actuator unit by carrying out aging treatment by applying driving pulses to the piezoelectric element. <P>SOLUTION: In an aging process for carrying out the aging treatment by applying a minimum number or more of the driving pulses to the piezoelectric element which can finish at least the initial change of the displacement amount of the piezoelectric element, the number of applied driving pulses is made more larger than a specified number for the piezoelectric element whose initial displacement amount obtained in the displacement amount measuring process is more larger than a reference displacement amount B, and the number of applied driving pulses is made more smaller than the specified number in a range not less than a minimum number for the piezoelectric element whose initial displacement amount is more smaller than the reference displacement amount. <P>COPYRIGHT: (C)2009,JPO&INPIT |
