| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing an alicyclic saturated hydrocarbon compound by using a purification method of using an adsorbent, removing impurities contained in the alicyclic saturated hydrocarbon compound suitable as a liquid immersion light exposure and excellent in transmittance at 193 nm, in a good efficiency, and having good reproducibility and a stable optical property. <P>SOLUTION: This alicyclic saturated hydrocarbon compound having ≥99% mean value of transmittance per 1 mm optical path length of the liquid at 193 nm with ≤0.1 3σ values is produced by bringing 1,1'-bicyclohexyl, exo-tetrahydrodicyclopentadiene or trans-decahydronaphthalene becoming a raw material, into contact with an adsorbent in an inert gas atmosphere having ≤0.1 vol.% oxygen concentration and ≤1 vol. ppm hydrocarbon concentration. <P>COPYRIGHT: (C)2009,JPO&INPIT |
