| 摘要 |
<p>A position detection jig is provided to perform the position control of the carrier place of the transfer arm. The position detection wafer(S) has the electrostatic capacity detector and sensor(50) for detecting the electrostatic capacity between the target object of the position control. The electrostatic capacity detection sensor have a plurality of electrostatic capacity detection electrodes(52) and a control circuit. The electrostatic capacity is formed between a plurality of electrostatic capacity detection electrodes and the target object. The control circuit communicates with the electrostatic capacity detection electrode and controls the detection of the electrostatic capacity by the electrostatic capacity detection electrode. The electrostatic capacity detection electrode is installed at the backside of the wafer for the position detection. The control circuit is installed at the front surface side of the wafer for the position detection.</p> |
