| 摘要 |
A wafer transfer robot and apparatus for manufacturing semiconductor are provided to improve the productivity by continually operating the other process chamber when one chamber is out of order.. The wafer transfer robot(100) comprises the lower left side robot arm(110), the lower part right side robot arm(120), the upper left robot arm(130), the upper right side robot arm and main body(160). The lower left side robot arm and lower part right side robot arm is line-symmetrically connected to the main body. The upper left robot arm and upper right side robot arm is line-symmetrically connected to the main body. The upper left robot arm is arranged at the upper part of the lower left side robot arm. The upper right side robot arm is arranged at the upper part of the lower part right side robot arm.
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